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As part of a "Wright Project" entitled
"Case Center for Surface Engineering,"
SCSAM will install a new dual-beam system
operating with a scanning focused ion beam
and a scanning electron beam, a
Quanta 200 3D made by FEI.
The Quanta 200 3D is a
versatile low-vacuum SEM/FIB for 2D and 3D
material characterization and analysis.
Featuring three imaging modes -
high-vacuum, low-vacuum and ESEM, it
accommodates a wide range of samples. The
instrument will be equipped with a
field-emission Ga ion source and a thermal
electron emitter. The enabling
technologies, integrated onto a single
platform, further include high-volume
milling capabilities, ESEM differential
pumping variable pressure vacuum system
(oil-free), gaseous secondary and
backscattered electron detectors for
imaging and analysis in a gaseous chamber
environment, gas Chemistry technology for
enhanced milling rates, high-precision
specimen goniometer with 50 mm
travel along the x and y axes, automation
serving unattended sectioning with full
access to e-beam, i-beam, patterning, and
gas chemistry functionality, a Windows
2000, 4-quadrant "Beam per Quad" user
interface.
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