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The PHI 680 system consists of a
field-emission scanning electron microscope
with a Schottky emission cathode, a
secondary electron detector, and an axial
cylindrical mirror analyzer with a
multi-channel detector to collect Auger
electrons produced during electron imaging.
Very small spot sizes can be realized with
this instrument -down to 7 nm. This is
useful for high-resolution imaging and for
Auger data acquisition using low beam
currents. Inert gas sputtering (using a
PHI 06-350 ion gun) is used to clean
surface contamination from samples and to
remove material from a small area on the
surface for depth profiling. Several modes
of operation are available to the user,
including survey, line, profile, and
elemental mapping. Capable of multi-point
analysis, the instrument is a powerful tool
for routine failure analysis and quality
control of inorganic samples. An additional
device permits in situ fracture of
samples, at liquid nitrogen temperature if
necessary. The inert-gas sputtering system
is also used to generate primary ions for
the PHI 3600 secondary ion mass
spectrometer. This system is capable of a
mass range of up to 512 amu, and is
particularly useful for isotopic studies of
surface chemistry and for trace element
analysis.
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