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The Perkin-Elmer PHI-5600 system for
XPS/ESCA (X-ray photo-electron
spectrometry, electron spectroscopy for
chemical analysis) includes a conventional
dual anode X-ray source (Mg and Al), a
50 cm hemispherical electron energy
analyzer, a XYZT sample stage with
eight sample storages, and an inert gas
sputtering source (PHI-04-303) for sample
cleaning and depth profiling. This system
has been upgraded to include a
monochromated aluminum anode X-ray source,
a multi-channel detector, a sample stage
cooling attachment, and a small spot
(30 μm) electron lens with sample
imaging and mapping capability.
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