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This scanning electron microscope is
equipped with a field-emission gun, two
secondary electron detectors, a backscatter
detector, and an infrared chamber scope. In
addition, it has a Noran XEDS (X-ray
energy-dispersive spectrometry) system. The
microscope is capable of operating at a
spatial resolution of less than 1.5 nm
at 15 keV energy. It also performs
well at reduced beam energies (1 kV),
facilitating the observation of highly
insulating materials and of producing
micrographs that emphasize the near-surface
structure of the specimen.
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